Microscopic Examination of Cold Spray Cermet Sn+In2O3Coatings for Sputtering Target Materials

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Microscopic Examination of Cold Spray Cermet Sn+In2O3 Coatings for Sputtering Target Materials

Low-pressure cold spraying is a newly developed technology with high application potential. The aim of this study was to investigate potential application of this technique for producing a new type of transparent conductive oxide films target. Cold spraying technique allows the manufacture of target directly on the backing plate; therefore the proposed sputtering target has a form of Sn+In2O3 c...

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ژورنال

عنوان ژورنال: Scanning

سال: 2017

ISSN: 0161-0457,1932-8745

DOI: 10.1155/2017/4058636